The continuous line is designed with fifteen vacuum chambers, one of which is an inlet chamber, one for the outlet chamber, one for the inlet buffer chamber, one for the outlet buffer chamber, one for the inlet transfer chamber, one for the outlet transfer chamber, and two for the transfer chamber; Seven chambers, each of which can be mounted with four cathodes at the same time.
1. Ultimate vacuum: 7x10-4Pa.
2. Production cycle 40~120 seconds/rack
3. Basic frame size: 859*1500mm (can be customized according to requirements)
4. Film uniformity: ± 2%
5. Film stability: meeting international standards