Welcome to Raymiy Vacuum Technology (Changzhou) Co., Ltd.
Multi-arc ion vacuum coating equipment

Multi-arc ion vacuum coating equipment

Multi-arc sputtering Coating Equipment
The device ignites the evaporation source (cathode) under vacuum, and forms a self-sustaining arc discharge with the anode, that is, ions which discharge the cathode material from the bright spot of the cathode arc. Due to the local concentration of the current, the Joule heat generated locally causes the cathode material to be partially localized. Explosive plasmaization, a device that combines with a reactive gas under the action of a workpiece bias to deposit a film layer on the surface of the workpiece. There are advantages of fast deposition rate, high ionization rate, large ion energy, simple equipment operation, low cost and large production capacity.

Equipment model RM-MAS1000 RM-MAS1150 RM-MAS1200 RM-MAS1600
Vacuum chamber size 1000×1200 1150×1200 1200×1300 1600×1800 1600×2200
Film type Gold titanium nitride, black titanium carbide, colorful titanium oxide, wear-resistant film, super hard film, diamond film, metal decorative film, etc.
Power type DC power supply, intermediate frequency power supply, arc power supply, filament power supply, activation power supply, pulse bias power supply
Multi-arc target 5 or 18, 1 or 2 cylindrical targets for multiple arc targets
Twin target Intermediate frequency twin column target or planar target (1 to 4 pairs)
Vacuum chamber structure Vertical front door structure (double water jacket or sink cooling), rear suction system
Vacuum system Mechanical pump (RP) + Roots pump (RSP) + diffusion pump (DP or optional: molecular pump, cryogenic system -140 ° C) + maintenance pump (HP)
Heating system Normal temperature to 350 degrees adjustable and controllable (PID temperature control), stainless steel heating tube heating
Inflatable system Mass flow controller (1-4 channels)
Ultimate vacuum 6×10-4pa (no load, clean room)
Pumping time No-load atmosphere is pumped to 5×10-3pa for less than 13 minutes
Pressure holding ratio 1h≤0.6pa
Workpiece rotation Up or down rotation + public self-transition frequency stepless controllable adjustable, 0-20 rev / min
control method Manual + semi-automatic / touch screen + PLC
Remarks The vacuum chamber size can be customized according to customer's products and special process requirements.

Widely used in tools, molds, super-hard coatings, automotive wheels, golf equipment, watches, hotel supplies, sanitary ware, lamps, glasses frames, hardware, ceramics and glass and other decorative coatings.
Coating material: Suitable for various metal coatings (TiN, TiCN, CrN, TiALN, TiNbN, TiCrN, TiNC and various types of diamond film DLC metal materials).
Coating quality: high film density, strong adhesion, fast deposition speed, etc.

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